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    • Effect of O2/ar ratio on optical properties of indium tin oxide thin films deposited by dc magnetron sputtering 

      สุจินพรัหม, ศุภเดช; ภู่มณี, ชวลิต; ชูพันธ์, สุภาพ; กรอบทอง, สุชีวัน; สุทธนะ, สุทธิพจน์ (2015-06-05)
      Indium tin oxide thin films were deposited by DC magnetron sputtering from In2O3 and SnO2 as a ceramic target with 10 wt% of SnO2. The films were sputtered under pressure of 2?10-3 torr, power density of 1.23 W/cm2 and ...