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dc.contributor.authorใจเย็น, ศราวุธ
dc.contributor.authorอุทธิสินธุ์, จันทนี
dc.contributor.authorบาลทิพย์, นริศร์
dc.contributor.authorหมวกงาม, อันชัญ
dc.contributor.authorรักมาก, ศตวรรษ
dc.contributor.authorศรีบุศยกุล, ชลภิวิชญ์
dc.date.accessioned2015-06-05T06:21:17Z
dc.date.available2015-06-05T06:21:17Z
dc.date.issued2015-06-05
dc.identifier.urihttp://repository.rmutp.ac.th/handle/123456789/1734
dc.descriptionวารสารวิชาการและวิจัย มทร.พระนคร, ฉบับพิเศษ : 83-89en_US
dc.description.abstractA small plasma system using microwave oven was developed for the application of surface modification and cleaning in thin films research. The microwave oven with 800-Watt power generates 2.45-GHz frequency. The vacuum chamber was inserted into the microwave oven from the top of oven wall and it was evacuated by a rotary pump to less than 7 x 10-3 Torr. This system can generate argon and oxygen plasma at a pressure of 0.2 – 3.0 Torr. This small plasma system was applied to clean a surface of microscope glass slide using argon and oxygen plasma. To reveal the effects of argon and oxygen plasma on material surface, the glass slide was measured by contact angle tensiometer. The results show that the contact angle between a water droplet and glass surface decreases with increasing the exposure time. This result indicates that the cleanness of material surface was improved by using the small plasma system.en_US
dc.description.sponsorshipRajamangala University of Technology Phra Nakhonen_US
dc.language.isothen_US
dc.subjectPlasmaen_US
dc.subjectพลาสมาen_US
dc.subjectMicrowave Ovenen_US
dc.subjectเตาไมโครเวฟen_US
dc.subjectSurface Modificationen_US
dc.subjectปรับสภาพพื้นผิวen_US
dc.subjectSurface Cleaningen_US
dc.subjectทำความสะอาดพื้นผิวen_US
dc.titleDevelopment of small plasma system for surface modification and cleaningen_US
dc.typeJournal Articlesen_US
dc.contributor.emailauthorsarawut@rmutt.ac.then_US
dc.contributor.emailauthorarit@rmutp.ac.th
dc.contributor.emailauthorarit@rmutp.ac.th
dc.contributor.emailauthorarit@rmutp.ac.th
dc.contributor.emailauthorarit@rmutp.ac.th
dc.contributor.emailauthorarit@rmutp.ac.th


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