Show simple item record

dc.contributor.authorนรสิงห์, สรพงษ์
dc.contributor.authorเด่นจิตเจริญ, สมยศ
dc.contributor.authorลิ้มสุวรรณ, พิเชษฐ
dc.date.accessioned2015-06-05T09:17:01Z
dc.date.available2015-06-05T09:17:01Z
dc.date.issued2015-06-05
dc.identifier.urihttp://repository.rmutp.ac.th/handle/123456789/1739
dc.descriptionวารสารวิชาการและวิจัย มทร.พระนคร, ฉบับพิเศษ : 345-356en_US
dc.description.abstractIn this research, we studied and fabricated a small vacuum coating system which is suitable for small pieces of the samples. It can help us to save in both cost and time for coating materials in each run. The home-built system consists of (1) a two-stage rotary pump used as a roughing and backing pump for a vacuum chamber and (2) a diffusion pump. The ultimate pressure of this diffusion pump is about 10-7 torr. From the result of testing the fabricated vacuum system, it is found that the chamber pressure under the atmosphere can get down to 2.2 x 10-2 torr in 6 minutes by the rotary pump. The pressure inside the chamber is continuously lower to achieve 4.5 x 10-5torr in 30 minutes by the diffusion pump. Moreover, we did further testing the system by coating pure aluminum (99.999%) on a Si (100) substrate using a resistive heater source made of tungsten with applied voltage and current of about 2.19 V and 110 A, respectively. The aluminum surface has been investigated by SEM and AFM.en_US
dc.description.sponsorshipRajamangala University of Technology Phra Nakhonen_US
dc.language.isothen_US
dc.subjectvacuum coatingen_US
dc.subjectการเคลือบในสุญญากาศen_US
dc.subjectthermal evaporationen_US
dc.subjectการระเหยสารด้ายความร้อนen_US
dc.subjectdiffusion pumpen_US
dc.subjectปั๊มแพร่ไอน้ำมันen_US
dc.titleStudy of a small vacuum coating system for thermal evaporationen_US
dc.typeJournal Articlesen_US
dc.contributor.emailauthorsorapong_nor@yahoo.comen_US
dc.contributor.emailauthorarit@rmutp.ac.th
dc.contributor.emailauthorarit@rmutp.ac.th


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record